Modeling the voltage nonlinearity of high-k MIM capacitors

نویسندگان

  • D. Kannadassan
  • Maryam Shojaei Baghini
چکیده

Voltage nonlinearity is a crucial performance parameter of MIM capacitors for RF, analog and mixed signal IC applications. In present work, the fabrication and characterization of anodic high-k MIM capacitors are reported in detail and modeling of nonlinearity coefficient of capacitance is developed using polarization of induced dipoles. The model agrees with experimental results for various high-k dielectric MIM capacitors. It explores the origin of nonlinearity in capacitance–voltage characteristics of MIM capacitors and also predicts the potential requirements to meet the ITRS requirements. 2013 Elsevier Ltd. All rights reserved.

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تاریخ انتشار 2013